Modal pattern analysis and experimental investigation of multimode interferometric sensing: a path to fully-integrated silicon-CMOS-based chem/bio sensors

Author

Lillie, J.J. ; Thomas, M.A. ; Dennis, K.A. ; Jokerst, N.M. ; Henderson, C. ; Ralph, S.E.

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

Volume

1

fYear

2004

fDate

7-11 Nov. 2004

Firstpage

352

Abstract

A multimode, Mach-Zehnder, chem/bio sensor with sensitivity developed through modal pattern analysis is demonstrated on silicon. Simulated and experimental data show that waveguide structures less than 5000-μm enable fully-integrated sensors with index sensitivities near 3×10^-6 and methanol-in-vapor sensitivities near 250 parts-per-billion vapor (ppbv).

Keywords

CMOS integrated circuits; Mach-Zehnder interferometers; chemical sensors; elemental semiconductors; optical planar waveguides; optical sensors; silicon; Mach-Zehnder chem/bio sensor; fully-integrated silicon-CMOS-based chem/bio sensors; methanol-in-vapor sensitivities; modal pattern analysis; multimode interferometric sensing; waveguide structures; Biosensors; Chemical sensors; Chemical technology; Optical refraction; Optical sensors; Optical surface waves; Optical waveguides; Pattern analysis; Silicon; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE

Print_ISBN

0-7803-8557-8

Type

conf

DOI

10.1109/LEOS.2004.1363256

Filename

1363256