DocumentCode
2017019
Title
Integrated silicon-glass opto-chemical sensor for lab-on-chip applications
Author
De Stefano, L. ; Malecki, K. ; Moretti, L. ; Della Corte, F. ; Rendina, I.
Author_Institution
Inst. of Microelectron. & Microsystems, CNR, Naples, Italy
Volume
1
fYear
2004
fDate
7-11 Nov. 2004
Firstpage
354
Abstract
The compatibility of porous silicon, (PSi) and anodic bonding (AB) technologies for the realization of sensing microcomponents in lab-on-chip applications is demonstrated. Sensor for chemical and biological species have been fabricated promising further integration with optical and micromechanical devices.
Keywords
bonding processes; chemical sensors; elemental semiconductors; integrated optics; micro-optics; micromechanical devices; optical fabrication; optical glass; optical sensors; porous semiconductors; silicon; Si-SiO2; integrated silicon-glass opto-chemical sensor; lab-on-chip applications; micromechanical devices; porous silicon; Biomedical optical imaging; Biosensors; Bonding; Chemical and biological sensors; Chemical technology; Integrated optics; Micromechanical devices; Optical devices; Optical sensors; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN
0-7803-8557-8
Type
conf
DOI
10.1109/LEOS.2004.1363257
Filename
1363257
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