Title :
Integrated silicon-glass opto-chemical sensor for lab-on-chip applications
Author :
De Stefano, L. ; Malecki, K. ; Moretti, L. ; Della Corte, F. ; Rendina, I.
Author_Institution :
Inst. of Microelectron. & Microsystems, CNR, Naples, Italy
Abstract :
The compatibility of porous silicon, (PSi) and anodic bonding (AB) technologies for the realization of sensing microcomponents in lab-on-chip applications is demonstrated. Sensor for chemical and biological species have been fabricated promising further integration with optical and micromechanical devices.
Keywords :
bonding processes; chemical sensors; elemental semiconductors; integrated optics; micro-optics; micromechanical devices; optical fabrication; optical glass; optical sensors; porous semiconductors; silicon; Si-SiO2; integrated silicon-glass opto-chemical sensor; lab-on-chip applications; micromechanical devices; porous silicon; Biomedical optical imaging; Biosensors; Bonding; Chemical and biological sensors; Chemical technology; Integrated optics; Micromechanical devices; Optical devices; Optical sensors; Silicon;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363257
