DocumentCode
2017075
Title
Bifocal and negative microlens arrays in hard optical materials
Author
Gu, E. ; Choi, H.W. ; Liu, C. ; Watson, I.M. ; Girkin, J.M. ; Dawson, M.D.
Author_Institution
Inst. of Photonics, Strathclyde Univ., Glasgow, UK
Volume
1
fYear
2004
fDate
7-11 Nov. 2004
Firstpage
360
Abstract
Using the methods of photoresist reflow and moulding, bifocal and negative microlens arrays, with diameters down to 10 μm, have been fabricated in GaN-on-sapphire. The optical properties of these microlens arrays were characterised by a recently developed reflection/transmission confocal microscopy technique and agree well with calculated values.
Keywords
III-V semiconductors; gallium compounds; microlenses; moulding; optical arrays; optical fabrication; optical materials; photoresists; wide band gap semiconductors; GaN; GaN-on-sapphire; bifocal negative microlens arrays; hard optical materials; moulding; photoresist reflow; reflection/transmission confocal microscopy; Gallium nitride; Lenses; Microoptics; Optical arrays; Optical materials; Optical microscopy; Optical reflection; Resists; Semiconductor laser arrays; Surface fitting;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN
0-7803-8557-8
Type
conf
DOI
10.1109/LEOS.2004.1363260
Filename
1363260
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