Title :
Effective methods to prevent stiction during post-release-etch processing
Author :
Abe, Takeshi ; Messner, William C. ; Reed, Michael L.
fDate :
29 Jan-2 Feb 1995
Keywords :
Etching; Fabrication; Laboratories; Laplace equations; Liquids; Micromachining; Microstructure; Shape; Surface tension; Temperature;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472547
