Title :
Novel fabrication of 3-D microstructures by volume oxidation of AlGaAs
Author :
Hsu, Alan Y. ; Cich, Michael J. ; Vawter, Gregory A. ; Peake, Gregory M. ; Alford, Charles
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
A novel method for fabricating AIGaAs microstructures is investigated. The process consists of a thermal volume oxidation of AIGaAs/GaAs epitaxy and selective etching of the resulting aluminum oxide.
Keywords :
III-V semiconductors; aluminium compounds; etching; gallium arsenide; micro-optics; optical fabrication; oxidation; 3-D microstructures; AIGaAs microstructures; AlGaAs-GaAs; etching; thermal volume oxidation; volume oxidation; Aluminum oxide; Epitaxial growth; Etching; Fabrication; Gallium arsenide; Microstructure; Nanoscale devices; Oxidation; Shape; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363263
