• DocumentCode
    2017262
  • Title

    Secondary ion emission from niobium and tantalum

  • Author

    Kulieva, M. ; Abdurahimova, G. ; Khalilov, E.

  • Author_Institution
    Samarkand State Univ., Uzbekistan
  • fYear
    2003
  • fDate
    5-5 June 2003
  • Firstpage
    296
  • Abstract
    Summary form only given, as follows. Summary form only given. The comparative study of mass-spectra, relative yields and kinetic energy distribution of Nb and Ta atomic and cluster ion sputtered from niobium and tantalum surfaces by atomic and polyatomic Au/sup $/projectiles has been carried out. The essential increase of the contribution of polyatomic clusters to the total yield of sputtered charged particles is observed at the transition from atomic ion bombardment to polyatomic one. The large cluster ions sputtered by polyatomic ion bombardment have higher kinetic and vibration energies than those produced by the atomic ion bombardment with the same energy per atom.
  • Keywords
    atomic clusters; gold; ion-surface impact; niobium; secondary ion emission; tantalum; Au; Au/sup -/ projectiles; Nb; Ta; atomic ion bombardment; cluster ion; kinetic energies; kinetic energy distribution; mass-spectra; polyatomic clusters; polyatomic ion bombardment; relative yields; sputtered charged particles; vibration energies; Grain boundaries; Ion emission; Kinetic theory; Microstructure; Niobium alloys; Projectiles; Semiconductor thin films; Silicon alloys; Solids; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
  • Conference_Location
    Jeju, South Korea
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-7911-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.2003.1228859
  • Filename
    1228859