Title :
Secondary ion emission from niobium and tantalum
Author :
Kulieva, M. ; Abdurahimova, G. ; Khalilov, E.
Author_Institution :
Samarkand State Univ., Uzbekistan
Abstract :
Summary form only given, as follows. Summary form only given. The comparative study of mass-spectra, relative yields and kinetic energy distribution of Nb and Ta atomic and cluster ion sputtered from niobium and tantalum surfaces by atomic and polyatomic Au/sup $/projectiles has been carried out. The essential increase of the contribution of polyatomic clusters to the total yield of sputtered charged particles is observed at the transition from atomic ion bombardment to polyatomic one. The large cluster ions sputtered by polyatomic ion bombardment have higher kinetic and vibration energies than those produced by the atomic ion bombardment with the same energy per atom.
Keywords :
atomic clusters; gold; ion-surface impact; niobium; secondary ion emission; tantalum; Au; Au/sup -/ projectiles; Nb; Ta; atomic ion bombardment; cluster ion; kinetic energies; kinetic energy distribution; mass-spectra; polyatomic clusters; polyatomic ion bombardment; relative yields; sputtered charged particles; vibration energies; Grain boundaries; Ion emission; Kinetic theory; Microstructure; Niobium alloys; Projectiles; Semiconductor thin films; Silicon alloys; Solids; Sputtering;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1228859