DocumentCode
2017283
Title
Reliability Analysis of Torsional Varactor
Author
Venkatesh, C. ; Navakanta Bhat
Author_Institution
Microelectron. Lab, Bangalore
fYear
2007
fDate
11-13 July 2007
Abstract
A torsional MEMS varactor with wide dynamic range, lower actuation voltage and isolation between actuation voltage and signal voltage has been proposed in C. Venkatesh et al. (2005). In this paper we address the effects of pull-in, residual stress and continuous cycling on the performance of torsional MEMS varactor.
Keywords
internal stresses; micromechanical devices; reliability; varactors; continuous cycling; pull-in stress effect; reliability analysis; residual stress effect; torsional MEMS varactor; Dynamic range; Filters; Micromechanical devices; Oscillators; Radiofrequency microelectromechanical systems; Switches; Thermal stresses; Torque; Varactors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits, 2007. IPFA 2007. 14th International Symposium on the
Conference_Location
Bangalore
Print_ISBN
978-1-4244-1014-9
Type
conf
DOI
10.1109/IPFA.2007.4378069
Filename
4378069
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