Title :
Reliability Analysis of Torsional Varactor
Author :
Venkatesh, C. ; Navakanta Bhat
Author_Institution :
Microelectron. Lab, Bangalore
Abstract :
A torsional MEMS varactor with wide dynamic range, lower actuation voltage and isolation between actuation voltage and signal voltage has been proposed in C. Venkatesh et al. (2005). In this paper we address the effects of pull-in, residual stress and continuous cycling on the performance of torsional MEMS varactor.
Keywords :
internal stresses; micromechanical devices; reliability; varactors; continuous cycling; pull-in stress effect; reliability analysis; residual stress effect; torsional MEMS varactor; Dynamic range; Filters; Micromechanical devices; Oscillators; Radiofrequency microelectromechanical systems; Switches; Thermal stresses; Torque; Varactors; Voltage;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2007. IPFA 2007. 14th International Symposium on the
Conference_Location :
Bangalore
Print_ISBN :
978-1-4244-1014-9
DOI :
10.1109/IPFA.2007.4378069
