Title :
A Tunable RF MEMS Inductor
Author :
Zine-El-Abidine, I. ; Okoniewski, M. ; McRory, J.G.
Author_Institution :
University of Calgary and TRLabs
Abstract :
This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a convetional RFIC device. The Inductor achieved a quality factor greater than 9 at 15 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
Keywords :
MEMS; inductor; radio frequency; tunable; Inductors; Micromechanical devices; Radiofrequency microelectromechanical systems; MEMS; inductor; radio frequency; tunable;
Conference_Titel :
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN :
0-7695-2189-4
DOI :
10.1109/ICMENS.2004.1509028
