Title :
High Performance Shallow Junction Well Transistor (SJET)
Author :
Mizuno, T. ; Asao, Y. ; Koga, J.
Author_Institution :
TOSHIBA Corp., Japan
Keywords :
Capacitance; Degradation; Fabrication; MOSFET circuits; Semiconductor thin films; Substrates; Threshold voltage; Ultra large scale integration; Very large scale integration; Voltage control;
Conference_Titel :
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location :
Oiso, Japan
DOI :
10.1109/VLSIT.1991.706014