Modelling the Nonlinear Dynamics of Electrically Driven Impact Microactuators

Accurate positioning in the micro or nano scale is of prime importance in the MEMS industry. Manual manipulation is difficult because of sticking due to surface adhesion forces. Regular microactuators need large actuation forces and a long driving distance. This would require large voltages to produce the desired forces. In contrast, micromachined actuators based on impulsive forces provide a solution to this problem. Impacts are a source of nonlinearity and a careful study of the dynamics is essential in order to ensure a consistent performance of the device. The present study explores the asymptotic dynamics associated with impact microactuators using both numerical integration and local analysis.