DocumentCode

2017721

Title

Final page

fYear

2010

fDate

June 30 2010-July 4 2010

Firstpage

1

Lastpage

1

Keywords

Seminars;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on

Conference_Location

Novosibirsk, Russia

Print_ISBN

978-1-4244-6626-9

Type

conf

DOI

10.1109/EDM.2010.5568766

Filename

5568766