Title :
A three-step high-Q variable MEMS capacitor with low actuation voltage
Author :
Zahirovic, Nino ; Mansour, Raafat R. ; Yu, Ming
Author_Institution :
Univ. of Waterloo, Waterloo, ON, Canada
fDate :
Sept. 29 2009-Oct. 1 2009
Abstract :
A tunable RF MEMS varactor with three-step behavior is presented. The device has a low actuation voltage of less than 12 V for the final step and a high quality factor of greater than 100 over the entire tuning range up to 10 GHz with a self resonance frequency above 24 GHz. The device shows a capacitance ratio of better than 3:1 with no de-embedding in a CPW shunt configuration.
Keywords :
Q-factor; coplanar waveguides; micromechanical devices; microwave devices; varactors; waveguide components; CPW shunt configuration; actuation voltage; capacitance ratio; quality factor; self resonance frequency; three-step high-Q variable MEMS capacitor; tunable RF MEMS varactor; Capacitance; Capacitors; Low voltage; Micromechanical devices; Q factor; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Tuning; Varactors; MEMS varactors; RF MEMS capacitors; tunable capacitors;
Conference_Titel :
Microwave Conference, 2009. EuMC 2009. European
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4748-0
