Title :
Micromachined integrated optics for free-space interconnections
Author :
Lin, L.Y. ; Lee, S.S. ; Wu, M.C. ; Pister, K.S.J.
fDate :
29 Jan-2 Feb 1995
Keywords :
Gratings; Integrated optics; Lenses; Mirrors; Optical device fabrication; Optical devices; Optical interconnections; Optical signal processing; Packaging; Sprites (computer);
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472550
