Title :
A unified model for on-chip CPWs with various types of ground shields
Author :
Wang, Hongrui ; Zeng, Dajie ; Yang, Dongxu ; Zhang, Li ; Zhang, Lei ; Wang, Yan ; Qian, He ; Yu, Zhiping
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
Coplanar waveguides (CPW) are promising candidates for high quality passive devices in millimeter-wave frequency bands. In this paper, CPW transmission lines with and without ground shields have been designed and fabricated on 65nm CMOS technology. A physical-based model is proposed to describe the frequency-dependent per-unit-length L, C, R, and G parameters. Started from a standard CPW structure, influences of different kinds of ground shields have been analyzed and included into the general model. The accuracy of the model is confirmed by experimental results.
Keywords :
CMOS integrated circuits; coplanar waveguides; electromagnetic shielding; slow wave structures; CMOS technology; coplanar waveguides; ground shields; millimeter-wave frequency bands; on-chip CPW; Capacitance; Conductors; Coplanar waveguides; Inductance; Integrated circuit modeling; Metals; Substrates; CMOS; Coplanar waveguides (CPW); Ground shield; slow wave;
Conference_Titel :
Radio Frequency Integrated Circuits Symposium (RFIC), 2011 IEEE
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4244-8293-1
Electronic_ISBN :
1529-2517
DOI :
10.1109/RFIC.2011.5940663
