Title :
Surface morphology of Mg-doped ZnO thin films deposited on various conditions by pulsed laser deposition
Author :
Sohn, J.Y. ; Kim, B.I. ; Lee, S.D. ; Yu, Y.S.
Author_Institution :
Dept. of Phys., Kyungnam Univ., Masan, South Korea
Abstract :
Summary form only given, as follows. Mg-doped ZnO thin films on glass substrates were deposited using the pulsed laser deposition technique using a KrF eximer laser. The films are prepared at different substrate temperatures and different ambient gas pressures under laser power 1 U/cm/sup 2/, 5 Hz. Substrates were kept at a distance of 5 cm from the target. Surface morphology varied among films grown at various conditions. The structural characteristics of deposited films at different substrate temperature and ambient gas pressure were studied by XRD, SEM and AFM. We found the optimal condition of film deposition by PLD and discussed the Mg doping properties of ZnO thin films.
Keywords :
X-ray diffraction; atomic force microscopy; magnesium; pulsed laser deposition; scanning electron microscopy; semiconductor thin films; surface morphology; zinc compounds; KrF eximer laser; SEM; X ray diffraction; ZnO:Mg; atomic force microscopy; glass substrate; pulsed laser deposition; surface morphology; thin films; Gas lasers; Glass; Optical pulses; Pulsed laser deposition; Sputtering; Substrates; Surface emitting lasers; Surface morphology; Temperature; Zinc oxide;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1228893
