Design for Reliability (DfR) in MEMS using Worst-Case Methods

Author

Praveen, S. ; Lavu, S. ; Laur, Rainer

Author_Institution

Univ. of Bremen, Bremen

fYear

2007

fDate

11-13 July 2007

Abstract

The growing applications of microsystem devices in extreme environments have a great impact on the rising importance of their reliability studies. Reliability study in MEMS lacks the availability of methods and tools to analyze them in a quick and efficient way. In this paper, we present a novel approach for reliability analysis in MEMS using worst-case methods. The method facilitates the designers to find out the critical operational parameters of the device with respect to a particular functional specification. This paper also introduces a reliability coefficient instigated from an inherent advantage of the worst-case methods.

Keywords

micromechanical devices; reliability; MEMS; critical operational parameter; design for reliability; extreme environments; functional specification; microsystem devices; reliability analysis; worst-case methods; Accuracy; Actuators; Availability; Design methodology; Failure analysis; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Packaging; Performance analysis; Critical Operational Parameters; MEMS in Extreme Environments; Operational Parameters; Reliability Analysis; Worst-Case Reliability Coefficient (WCRC);

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits, 2007. IPFA 2007. 14th International Symposium on the

Conference_Location

Bangalore

Print_ISBN

978-1-4244-1014-9

Type

conf

DOI

10.1109/IPFA.2007.4378098

Filename

4378098