• DocumentCode
    2018112
  • Title

    Application of Back-side Laser Technique on Failure Analysis

  • Author

    Hoe, W.L.C. ; Ren De Lin ; Chee Hong Chong ; Coswin Lin

  • Author_Institution
    United Microelectron. Corp. Ltd., Singapore
  • fYear
    2007
  • fDate
    11-13 July 2007
  • Abstract
    The application of backside emission and laser technique (TIVA/OBIRCH) had been widely used in the semiconductor industry. This paper will discuss the usage of backside laser damage method to aid in this technique on localizing the failure spot. Two applications on backside laser; 1.Memory scramble verification and 2. Yield loss scenario using backside laser to verify the failure hypothesis will also be discussed.
  • Keywords
    failure analysis; integrated circuit reliability; integrated circuit yield; laser beam applications; back-side laser technique; backside emission; backside laser damage; failure analysis; failure spot localization; memory scramble verification; semiconductor industry; yield loss scenario; Costs; Electronics industry; Failure analysis; Glass; Laser applications; Microelectronics; Optimization methods; Semiconductor lasers; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 2007. IPFA 2007. 14th International Symposium on the
  • Conference_Location
    Bangalore
  • Print_ISBN
    978-1-4244-1014-9
  • Type

    conf

  • DOI
    10.1109/IPFA.2007.4378099
  • Filename
    4378099