Title :
Novel functionality using micro-gaseous devices
Author :
Nathanson, Harvey C. ; Liberman, Irv ; Freidhoff, Carl
fDate :
29 Jan-2 Feb 1995
Keywords :
Displays; Electrostatics; Gallium arsenide; Micromechanical devices; Mirrors; Optical devices; Optical modulation; Optical transmitters; Switches; Transmission line matrix methods;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472551