DocumentCode :
2018136
Title :
Novel functionality using micro-gaseous devices
Author :
Nathanson, Harvey C. ; Liberman, Irv ; Freidhoff, Carl
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
72
Keywords :
Displays; Electrostatics; Gallium arsenide; Micromechanical devices; Mirrors; Optical devices; Optical modulation; Optical transmitters; Switches; Transmission line matrix methods;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472551
Filename :
472551
Link To Document :
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