Title : 
Novel functionality using micro-gaseous devices
         
        
            Author : 
Nathanson, Harvey C. ; Liberman, Irv ; Freidhoff, Carl
         
        
        
            fDate : 
29 Jan-2 Feb 1995
         
        
        
            Keywords : 
Displays; Electrostatics; Gallium arsenide; Micromechanical devices; Mirrors; Optical devices; Optical modulation; Optical transmitters; Switches; Transmission line matrix methods;
         
        
        
        
            Conference_Titel : 
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
         
        
            Print_ISBN : 
0-7803-2503-6
         
        
        
            DOI : 
10.1109/MEMSYS.1995.472551