Title :
Failure Analysis of I/O with ESD Protection Devices in Advanced CMOS Technologies
Author :
Muhammad, Muhammad ; Gauthier, R. ; Chatty, K. ; Junjun Li ; Seguin, Chris
Author_Institution :
IBM Semicond. Res., Essex Junction
Abstract :
Many types of ESD protection devices such as diodes, NFETs, SCRs and RC-triggered power clamps having different failure mechanisms are used in advanced CMOS technologies. Circuit schematic analysis and SEM failure analysis are utilized to clearly predict and identify the failing I/O driver/receiver devices and/or the various ESD protection devices during an ESD event.
Keywords :
CMOS integrated circuits; electrostatic discharge; failure analysis; integrated circuit reliability; CMOS technologies; ESD protection devices; SEM; circuit schematic analysis; electrostatic discharge; failure analysis; CMOS technology; Circuit analysis; Clamps; Driver circuits; Electrostatic discharge; Failure analysis; Protection; Research and development; Semiconductor diodes; Thyristors;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2007. IPFA 2007. 14th International Symposium on the
Conference_Location :
Bangalore
Print_ISBN :
978-1-4244-1014-9
DOI :
10.1109/IPFA.2007.4378100
