Title :
Lens-integrated THz imaging arrays in 65nm CMOS technologies
Author :
Sherry, Hani ; Al Hadi, Richard ; Grzyb, Janusz ; Öjefors, Erik ; Cathelin, Andreia ; Kaiser, Andreas ; Pfeiffer, Ullrich R.
Author_Institution :
IHCT, Univ. of Wuppertal, Wuppertal, Germany
Abstract :
THz CMOS imagers integrated with hyperhemispherical Si-lenses are presented and characterized. FPAs are implemented in 65nm CMOS bulk and SOI technologies. Lens-integrated detectors at 0.65 THz show an increase of 15dB and 20dB in SNR compared to front-side illumination for SOI and bulk respectively. The responsivities Rv are increased and a minimum noise-equivalent power NEP of 17pW/√(Hz) is measured for SOI detectors with the lens. THz Images are presented.
Keywords :
CMOS image sensors; elemental semiconductors; microwave integrated circuits; silicon; terahertz wave imaging; FPA; SOI technologies; THz CMOS imagers; frequency 0.65 THz; hyperhemispherical Si-lenses; lens-integrated THz imaging arrays; size 65 nm; CMOS integrated circuits; Logic gates; Semiconductor device modeling; Silicon; CMOS SOI; CMOS bulk; Silicon lens; THz electronic systems; THz imaging; square-law detectors;
Conference_Titel :
Radio Frequency Integrated Circuits Symposium (RFIC), 2011 IEEE
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4244-8293-1
Electronic_ISBN :
1529-2517
DOI :
10.1109/RFIC.2011.5940670
