Study on the optimum operating condition of the dielectric barrier discharge (DBD) for removing photoresist

Summary form only given, as follows. In a dielectric barrier discharge, the amount of charge on the dielectric material of the electrode plays an important role in sustaining the plasma. The charge depends on the capacitance of the reactor. The operating frequency may change the charge condition of the electrode. Consequently the plasma property should depend on the capacitance of the reactor and the operating frequency. In this study, the effects of reactor capacitance on the discharge were investigated by varying the operating frequency and waveform of the applied voltage. The experiments were carried out with a planar type reactor at atmospheric pressure.