Title :
Linear microvibromotor for positioning optical components
Author :
Daneman, M.J. ; Tien, N.C. ; Solgaard, O. ; Pisano, A.P. ; Lau, K.Y. ; Muller, R.S.
fDate :
29 Jan-2 Feb 1995
Keywords :
Actuators; Electrostatics; Flanges; Micromachining; Optical devices; Q factor; Resonance; Sensor phenomena and characterization; Velocity control; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472554
