Low-pressure micro plasma generation by harmonic electron cyclotron resonance

Summary form only given, as follows. Microplasma generation is difficult for low-pressure condition by the limiting of famous Paschen´s Law. However, cyclotron motion around magnetic field line is useful to get longer lifetime of initial electrons In our previous theoretical work. It has been predicted that the harmonic ECR can generate micro plasmas with several 100 /spl mu/m gap length at the pressures less than 0.01 Torr. In the present paper, we will report on the experimental verification of low-pressure microplasma generation showing the breakthrough of Paschen´s Law.