Title :
Integration of conducting polymer micro- and nano-actuators with semiconductor photonic devices
Author :
Berdichevsky, Yevgeny ; Lo, Y.H.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., San Diego, CA, USA
Abstract :
In this work, PPy (polypyrrole) doped with DBS (dodecylbenzenesulfonate) anions is used as actuators or "artificial muscles". Microactuators described in this study are fabricated by electrochemically polymerizing PPy on patterned Au thin film deposited on a Si pn junction. A PPy nanostructure has been fabricated on a semiconductor substrate, enabling future integration with electronic or photonic devices.
Keywords :
conducting polymers; electrochemistry; gold; integrated optics; integrated optoelectronics; metallic thin films; microactuators; nanostructured materials; nanotechnology; optical variables control; p-n junctions; polymerisation; semiconductor devices; silicon; Au; PPy nanostructure; Si; Si pn junction; artificial muscles; conducting polymer; device integration; dodecylbenzenesulfonate anions; electrochemical polymerization; electronic devices; microactuators; nanoactuators; nanostructure fabrication; optically controlled microactuator; patterned Au thin film; polypyrrole; semiconductor photonic devices; semiconductor substrate; Actuators; Gold; Microactuators; Muscles; Nanoscale devices; Polymer films; Satellite broadcasting; Semiconductor thin films; Sputtering; Substrates;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363335
