Title :
An ultrasonic motor using bending cylindrical transducer based on PZT thin film
Author :
Morita, Takeshi ; Kurosawa, Minoru ; Higuchi, Toshiro
fDate :
29 Jan-2 Feb 1995
Keywords :
Electrodes; Electrostatics; Micromotors; Piezoelectric transducers; Sputtering; Stators; Titanium; Torque; Transistors; Ultrasonic transducers;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472555
