• DocumentCode
    2019371
  • Title

    Experimental investigation of dual plasma layer formation around the anode in magnetized radio frequency inductively coupled hydrogen plasma

  • Author

    Tang, D.L. ; Chu, Paul K.

  • Author_Institution
    Dept. of Phys. & Mater. Sci., City Univ. of Hong Kong, Kowloon, China
  • fYear
    2003
  • fDate
    5-5 June 2003
  • Firstpage
    342
  • Abstract
    Summary form only given, as follows. A dual plasma layer is created in magnetized radio frequency inductively coupled plasma. The effects of the external magnetic field and anode voltage on the evolution of the cylindrical luminous dual plasma layer from the anode glow are investigated in magnetized hydrogen plasmas. The anode glow is initially produced from the additional DC discharge which forms when a cylindrical anode platform inserted into the plasma diffusion region is positively biased. If the anode voltage is sufficiently high, the anode glow is transformed into an elongated luminous dual layer around the anode in the plasma diffusion region, in which a diverging magnetic field is coupled with an external magnetic field. The weakly magnetized plasma is needed for the formation of this double layer, and there is an upper limit on the magnetic field strength, beyond which the dual plasma layer disappears. The dependence of the dual layer structure on the magnetic field strength, anode voltage and the neutral gas pressure are also studied. The double layer structures are visually apparent because of the enhanced light emission from the neutrals excited by the energetic electrons. Some photographs of these structures will also be shown to demonstrate the phenomenon.
  • Keywords
    glow discharges; plasma materials processing; plasma sources; additional DC discharge; anode glow; anode voltage; cylindrical luminous layer; dual plasma layer; enhanced light emission; external magnetic field; magnetized plasma; plasma diffusion region; plasma layer evolution; radio frequency inductively coupled plasma; Anodes; Couplings; Electron emission; Hydrogen; Magnetic fields; Physics; Plasmas; Radio frequency; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
  • Conference_Location
    Jeju, South Korea
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-7911-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.2003.1228943
  • Filename
    1228943