Title :
Planar electrooptic switches with PLZT deflectors hybrid integrated on Si substrates
Author :
Yokouchi, Kishio ; Glebov, Alexei L. ; Lee, Michael G.
Author_Institution :
Dept. of Adv. Optoelectron. Technol., Fujitsu Labs. of America Inc., Sunnyvale, CA, USA
Abstract :
Prototypes of electrooptic planar deflector switches are fabricated. Deflectors with epitaxial PLZT films are assembled on silica-on-silicon optical substrates. The switching operations are demonstrated at about 40 V and switching times less than 0.5 μs.
Keywords :
electro-optical switches; epitaxial layers; integrated optics; integrated optoelectronics; lanthanum compounds; lead compounds; optical deflectors; optical fabrication; optical films; 40 V; PLZT; PLZT deflectors; PbLaZrO3TiO3; Si substrates; SiO2-Si; electrooptic switches; epitaxial PLZT films; hybrid integration; planar deflector switches; silica-on-silicon optical substrates; switching operations; Electrooptic deflectors; Electrooptical waveguides; Lenses; Microoptics; Optical arrays; Optical films; Optical waveguides; Slabs; Substrates; Switches;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363346
