Title :
Vertical comb array microactuators
Author :
Selvakumar, A. ; Najafi, K. ; Juan, W.H. ; Pang, S.
fDate :
29 Jan-2 Feb 1995
Keywords :
Actuators; Bridge circuits; Capacitors; Electrodes; Electrostatics; Etching; Fabrication; Microactuators; Micromachining; Microstructure;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472556
