DocumentCode
2019591
Title
Laser diagnostics of the sheath region in an argon DC discharge
Author
Young Wook Choi ; Hae June Lee
Author_Institution
Korea Electrotechnol. Res. Inst., Changwon, South Korea
fYear
2003
fDate
5-5 June 2003
Firstpage
346
Abstract
Summary form only given, as follows. The electric fields of the sheath region in an argon dc discharge were measured using a laser optogalvanic spectroscopy in a pressure range from 0.88 to 10 Torr. The sheath width is estimated as the position where the electric field becomes zero, and the pressure dependence of the measured sheath width was obtained to be (pressure)/sup -1/3/. The measured electric fields agree well with one-dimensional simulation results but are slightly different from collisional sheath theory in the mobility limited region. The discrepancy of the theory from the experiment and simulation results was found to be caused by the change of ion current density due to the ion collisions in the sheath region.
Keywords
argon; current density; discharges (electric); optogalvanic spectra; plasma diagnostics; plasma sheaths; 0.88 to 10 torr; Ar; DC discharge; electric fields; ion collisions; ion current density; laser diagnostics; laser optogalvanic spectra; one-dimensional simulation; pressure dependence; sheath region; sheath width; Argon; Current density; Electric variables measurement; Position measurement; Spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location
Jeju, South Korea
ISSN
0730-9244
Print_ISBN
0-7803-7911-X
Type
conf
DOI
10.1109/PLASMA.2003.1228952
Filename
1228952
Link To Document