• DocumentCode
    2019591
  • Title

    Laser diagnostics of the sheath region in an argon DC discharge

  • Author

    Young Wook Choi ; Hae June Lee

  • Author_Institution
    Korea Electrotechnol. Res. Inst., Changwon, South Korea
  • fYear
    2003
  • fDate
    5-5 June 2003
  • Firstpage
    346
  • Abstract
    Summary form only given, as follows. The electric fields of the sheath region in an argon dc discharge were measured using a laser optogalvanic spectroscopy in a pressure range from 0.88 to 10 Torr. The sheath width is estimated as the position where the electric field becomes zero, and the pressure dependence of the measured sheath width was obtained to be (pressure)/sup -1/3/. The measured electric fields agree well with one-dimensional simulation results but are slightly different from collisional sheath theory in the mobility limited region. The discrepancy of the theory from the experiment and simulation results was found to be caused by the change of ion current density due to the ion collisions in the sheath region.
  • Keywords
    argon; current density; discharges (electric); optogalvanic spectra; plasma diagnostics; plasma sheaths; 0.88 to 10 torr; Ar; DC discharge; electric fields; ion collisions; ion current density; laser diagnostics; laser optogalvanic spectra; one-dimensional simulation; pressure dependence; sheath region; sheath width; Argon; Current density; Electric variables measurement; Position measurement; Spectroscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
  • Conference_Location
    Jeju, South Korea
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-7911-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.2003.1228952
  • Filename
    1228952