Two-photon 3D lithography: materials and applications

Author

Kuebler, Stephen M. ; Braun, Kevin L. ; Stellacci, Francesco ; Bauer, Christina A. ; Halik, Marcus ; Zhou, Wenhui ; Yu, Tianyue ; Ober, Christopher K. ; Marder, Seth R. ; Perry, Joseph W.

Author_Institution

Dept. of Chem., Arizona Univ., Ithaca, NY, USA

Volume

2

fYear

2004

fDate

7-11 Nov. 2004

Firstpage

561

Abstract

This study demonstrates the fabrication of a representative set of microstructures based on the three classes of two-photon photoactive materials compositions. Such structures can be used directly for suitable applications but can also be used as templates for the growth or molding of other materials as needed for a specific application. Given the ability of the two-photon lithography to produce 3D patterns of arbitrary structure, there is potential for the fabrication of an essentially limitless number of micro- and nano-structures in a wide variety of materials compositions.

Keywords

micro-optics; moulding; nanolithography; nanopatterning; optical fabrication; optical materials; photolithography; two-photon processes; 3D lithography; 3D patterns; growth templates; material compositions; microstructure fabrication; molding; nanostructure fabrication; two-photon lithography; two-photon photoactive materials; Absorption; Chemistry; Lithography; Materials science and technology; Microstructure; Optical device fabrication; Photochemistry; Polymers; Power generation; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE

Print_ISBN

0-7803-8557-8

Type

conf

DOI

10.1109/LEOS.2004.1363362

Filename

1363362