Title :
Electrostatic curved electrode actuators
Author :
Legtenberg, Rob ; Berenschot, Erwin ; Elwenspoek, Miko ; Fluitman, Jan
fDate :
29 Jan-2 Feb 1995
Keywords :
Dielectric constant; Dielectrics and electrical insulation; Electrodes; Electrostatic actuators; Fabrication; Micromechanical devices; Polynomials; Shape; Structural beams; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472557
