DocumentCode
2019895
Title
Electrostatic curved electrode actuators
Author
Legtenberg, Rob ; Berenschot, Erwin ; Elwenspoek, Miko ; Fluitman, Jan
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
37
Keywords
Dielectric constant; Dielectrics and electrical insulation; Electrodes; Electrostatic actuators; Fabrication; Micromechanical devices; Polynomials; Shape; Structural beams; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472557
Filename
472557
Link To Document