Title :
Power dissipation mode transition induced by a driving frequency increase in capacitively coupled plasma
Author :
You, S.J. ; Kim, H.C. ; Chang, H.Y. ; Lee, Jung Keun
Author_Institution :
Dept of Phys., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Abstract :
Summary form only given, as follows. Electrical characteristics of capacitively coupled plasma at low Pressure (20 mTorr) are measured with different driving frequency. From these measurements, we found a significant change of the power characteristics during frequency increase, which is square dependence of power characteristics changes to a linear dependence. The observed result reveals a power dissipation mode transition induced by driving frequency modulation. Both calculated result from a simple sheath model and PIC have a good agreement with the experimental data.
Keywords :
frequency modulation; plasma sheaths; plasma simulation; plasma sources; 20 mtorr; PIC; capacitively coupled plasma; driving frequency increase; driving frequency modulation; electrical characteristics; low pressure; power characteristics; power dissipation mode transition; sheath model; Frequency measurement; Physics; Plasma density; Plasma measurements; Plasma properties; Plasma sources; Plasma temperature; Power dissipation; Pressure measurement; Probes;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1228963
