• DocumentCode
    2019982
  • Title

    Density transition characteristics in magnetized plasma by voltage biasing

  • Author

    Shinohara, Shoko ; Sugimori, K. ; Nakamura, Yoshihiko

  • Author_Institution
    Interdisciplinary Graduate Sch. of Eng. Sci., Kyushu Univ., Fukuoka, Japan
  • fYear
    2003
  • fDate
    5-5 June 2003
  • Firstpage
    353
  • Abstract
    Summary form only given, as follows. Self-excited transitions between two states were investigated by the voltage biasing to an inserted electrode in the inner region of a RP produced, magnetized plasma. Argon plasma was produced by a four-turn spiral antenna at a pressure of P/sub 0/ = 0.1 /spl sim/ 10 mTorr. The continuous output rf power and frequency of P/sub rf/ = 160 /spl sim/ 500 W and f/sub rf/ = 7 MHz, respectively, were applied to a linear device, 45 cm in diameter and 170 cm in axial length, with the uniform magnetic field of B = 500 G. In order to control the radial potential profile, we used ten concentric, segmented rings, made of stainless steel with a thickness of 0.03 cm, as biased electrodes. Repeated transition phenomena with abrupt reductions and jumps of the electron density were observed (flip-flop pattern in bistable systems), by voltage biasing to an inserted electrode in the inner region of a cylindrical magnetized plasma. These global, self-excited, density transitions and back ones between two states were accompanied by changes of the floating potential profile and the bias current tinder various parameters. Detailed spatio-temporal plasma characteristics were also investigated using a 24 channel Langmuir probe array. Control of the staying time probability in one of two states with hysteresis loops was attempted, changing the bias voltage, which showed the importance of a sheath region as well as fine structural patterns.
  • Keywords
    Langmuir probes; bifurcation; hysteresis; plasma density; plasma instability; plasma sheaths; plasma sources; plasma transport processes; 0.1 to 10 mtorr; Langmuir probe; bistable systems; density profiles; density transition characteristics; fine structural patterns; flip-flop pattern; floating potential profile; hysteresis loops; magnetized plasma; plasma diffusion; plasma generation; plasma sustainment; radial potential profile; rotation profiles; self-excited transitions; sheath region; spatiotemporal characteristics; staying time probability; voltage biasing; Argon; Electrodes; Frequency; Magnetic fields; Plasma density; Plasma properties; Spirals; Steel; Thickness control; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
  • Conference_Location
    Jeju, South Korea
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-7911-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.2003.1228966
  • Filename
    1228966