• DocumentCode
    2020118
  • Title

    Pumping mechanism using periodic phase changes of a fluid

  • Author

    Ozaki, Koichi

  • fYear
    1995
  • fDate
    29 Jan-2 Feb 1995
  • Firstpage
    31
  • Keywords
    Floods; Fluid flow control; Kinematics; Laboratories; Mechanical engineering; Micropumps; Pumps; Temperature dependence; Valves; Viscosity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
  • Print_ISBN
    0-7803-2503-6
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1995.472558
  • Filename
    472558