DocumentCode
2020350
Title
Surface acoustic wave atomizer with pumping effect
Author
Kurosawa, Minoru ; Watanabe, Takayuki ; Higuchi, Toshiro
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
25
Keywords
Acoustic materials; Acoustic waves; Acoustical engineering; Electrodes; Endoscopes; Frequency; Pumps; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472559
Filename
472559
Link To Document