Title :
A bidirectional silicon micropump
Author :
Zengerle, R. ; Kluge, S. ; Richter, M. ; Richter, A.
fDate :
29 Jan-2 Feb 1995
Keywords :
Chemical analysis; Chemical elements; Electrodes; Electrostatics; Frequency; Micropumps; Pumps; Silicon; Valves; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472560
