Title :
Micromachined hydraulic astable multivibrator
Author :
Lammerink, T.S.J. ; Tas, N.R. ; Berenschot, J.W. ; Elwenspoek, M.C. ; Fluitman, J.H.J.
fDate :
29 Jan-2 Feb 1995
Keywords :
Capacitors; Control systems; Coupling circuits; Filters; Inverters; Pressure control; Pumps; Resistors; Valves; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472561
