Title :
Microchemistry: manipulation, fabrication, and spectroscopy in small domains
fDate :
29 Jan-2 Feb 1995
Keywords :
Charge carrier processes; Chemical lasers; Chemistry; Gas lasers; Laser ablation; Laser beams; Optical device fabrication; Optical pulses; Photochemistry; Spectroscopy;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472563
