DocumentCode
2021673
Title
Low temperature SDB and interface behaviours
Author
Jiao, Jiwei ; Lu, Deren ; Xiong, ´Bin ; Wang, Weiyuan
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
394
Keywords
Annealing; Atomic measurements; Cleaning; Laboratories; Semiconductor device measurement; Silicon; Surface treatment; Temperature distribution; Transducers; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472564
Filename
472564
Link To Document