DocumentCode :
2021673
Title :
Low temperature SDB and interface behaviours
Author :
Jiao, Jiwei ; Lu, Deren ; Xiong, ´Bin ; Wang, Weiyuan
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
394
Keywords :
Annealing; Atomic measurements; Cleaning; Laboratories; Semiconductor device measurement; Silicon; Surface treatment; Temperature distribution; Transducers; Wafer bonding;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472564
Filename :
472564
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2021673
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