Title :
Add-drop filters utilizing vertically-coupled microdisk resonators in silicon
Author :
Koonath, Prakash ; Indukuri, Tejaswi ; Jalali, Bahram
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
This paper reports the fabrication and characterization of add-drop filters based on vertically coupled microdisk resonators in silicon. SIMOX 3-D sculpting is the technique used to fabricate monolithically integrated filters based on microdisk resonator structures that show adjacent channel cross talk suppression as high as 15 dB for channels that are separated by 1.5 nm.
Keywords :
integrated optics; micro-optics; monolithic integrated circuits; optical couplers; optical crosstalk; optical fabrication; optical filters; optical resonators; telecommunication channels; 1.5 nm; SIMOX 3-D sculpting; Si; add-drop filters; channel cross talk suppression; monolithically integrated filters; silicon; vertically-coupled microdisk resonators; Annealing; Etching; Lithography; Optical devices; Optical filters; Optical resonators; Optical waveguides; Oxygen; Resonator filters; Silicon;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363455
