• DocumentCode
    2022273
  • Title

    Hemipherical wineglass shells fabricated by a Chemical Foaming Process

  • Author

    Bin Luo ; Jintang Shang ; Yuzhen Zhang

  • Author_Institution
    Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China
  • fYear
    2015
  • fDate
    11-14 Aug. 2015
  • Firstpage
    951
  • Lastpage
    954
  • Abstract
    This paper explores a Chemical Foaming Process (CFP) as an enabling mechanism for creating 3-D structures such as hemispherical shells. The Chemical Foaming Process utilizes the thermal decomposition of the foaming agent, TiH2 in the paper, to increase the air pressure in the cavity to foam Pyrex 7740 glass into 3-D smooth and symmetric wineglass shells under high temperature. The Chemical Foaming Process for fabricating 3-D hemispherical shells was experimentally demonstrated, and the hemispherical shell was characterized by Scanning Electronic Microscopy (SEM). The results indicate that the method for fabricating 3-D hemispherical shells of high aspect ratio may provide a basis for hemispherical shell resonators and promise micro-scale Hemispherical Resonator Gyroscope (μHRG).
  • Keywords
    foams; glass; pyrolysis; scanning electron microscopy; shells (structures); 3D smooth wineglass shells; SEM; cavity; chemical foaming process; foam Pyrex 7740 glass; hemipherical wineglass shells; hemispherical shell resonators; microscale hemispherical resonator gyroscope; scanning electronic microscopy; symmetric wineglass shells; thermal decomposition; Assembly; Cavity resonators; Chemicals; Heating; Scanning electron microscopy; Silicon; Chemical Foaming Process; HSR; gyroscope; hemispherical shell; hemispherical shell resonator;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Packaging Technology (ICEPT), 2015 16th International Conference on
  • Conference_Location
    Changsha
  • Type

    conf

  • DOI
    10.1109/ICEPT.2015.7236736
  • Filename
    7236736