Title :
Hemipherical wineglass shells fabricated by a Chemical Foaming Process
Author :
Bin Luo ; Jintang Shang ; Yuzhen Zhang
Author_Institution :
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China
Abstract :
This paper explores a Chemical Foaming Process (CFP) as an enabling mechanism for creating 3-D structures such as hemispherical shells. The Chemical Foaming Process utilizes the thermal decomposition of the foaming agent, TiH2 in the paper, to increase the air pressure in the cavity to foam Pyrex 7740 glass into 3-D smooth and symmetric wineglass shells under high temperature. The Chemical Foaming Process for fabricating 3-D hemispherical shells was experimentally demonstrated, and the hemispherical shell was characterized by Scanning Electronic Microscopy (SEM). The results indicate that the method for fabricating 3-D hemispherical shells of high aspect ratio may provide a basis for hemispherical shell resonators and promise micro-scale Hemispherical Resonator Gyroscope (μHRG).
Keywords :
foams; glass; pyrolysis; scanning electron microscopy; shells (structures); 3D smooth wineglass shells; SEM; cavity; chemical foaming process; foam Pyrex 7740 glass; hemipherical wineglass shells; hemispherical shell resonators; microscale hemispherical resonator gyroscope; scanning electronic microscopy; symmetric wineglass shells; thermal decomposition; Assembly; Cavity resonators; Chemicals; Heating; Scanning electron microscopy; Silicon; Chemical Foaming Process; HSR; gyroscope; hemispherical shell; hemispherical shell resonator;
Conference_Titel :
Electronic Packaging Technology (ICEPT), 2015 16th International Conference on
Conference_Location :
Changsha
DOI :
10.1109/ICEPT.2015.7236736