Performance impact of monolayer coating of polysilicon micromotors

Author

Deng, Kai ; Collins, Rochael J. ; Mehregany, Mehran ; Sukenik, Chaim N.

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

368

Keywords

Coatings; Flanges; Friction; Gears; Micromotors; Rotors; Silicon; Stators; Surface treatment; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

DOI

10.1109/MEMSYS.1995.472568

Filename

472568

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