DocumentCode

2022803

Title

Fabrication of monolithic microchannels for IC chip cooling

Author

Joo, Youngcheol ; Dieu, Kiet ; Kim, Chang-Jin

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

362

Keywords

Cooling; Costs; Etching; Fabrication; Heat sinks; Machining; Microchannel; Monolithic integrated circuits; Resists; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

conf

DOI

10.1109/MEMSYS.1995.472569

Filename

472569