Title :
Fabrication of monolithic microchannels for IC chip cooling
Author :
Joo, Youngcheol ; Dieu, Kiet ; Kim, Chang-Jin
fDate :
29 Jan-2 Feb 1995
Keywords :
Cooling; Costs; Etching; Fabrication; Heat sinks; Machining; Microchannel; Monolithic integrated circuits; Resists; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472569
