Micro-fabricated tunable artificial dielectric for reconfigurable microwave circuits

This publication demonstrates the feasibility of integrated Artificial Dielectric (AD) devices using classical microtechnologies for microwave and millimeterwave applications. We developed a very simple process, which translates into broadband components under low losses operation: 1.4 dB/cm at 15 GHz has been measured and can be even furthermore improved. Moreover, the great advantage of the investigated architecture and associated technology resides in wide tunability. High range of permittivity was measured up to 70%, which translates into notably tunable true time delay phase shifter featuring 60°/dB at 15 GHz. The easy design and fabrication of high performances and high tunable microwave and millimeterwave circuits can then be envisioned thanks to micro-fabricated reconfigurable AD.