Title :
Self-aligned machining and assembly of high aspect ratio microparts into silicon
Author :
Langen, H.H. ; Masuzawa, T. ; Fujino, M.
fDate :
29 Jan-2 Feb 1995
Keywords :
Assembly; Fabrication; Machining; Metals industry; Micromechanical devices; Micromotors; Prototypes; Silicon; Skeleton; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472571
