Analysis of a double-phase regulation and an ultra wideband tunable micro electromechanical system resonator

To deal with the problems of narrow band and fixed resonant frequency of traditional MEMS (Micro electromechanical system) resonator caused by single load and vertical deformation, this paper proposes a novel MEMS resonator featured with ultra wideband, tunable frequency and two stage regulations based on vertical and horizontal load. The differential equations of vertical and horizontal load, double stages regulation resonator are built, and the frequency equations of the resonator, the two ends of which is anchored, are deduced. The center frequency of the proposed resonator is 17.7 MHz, and the two stages range are 395480 ppm and 16 ppm, respectively.