• DocumentCode
    2023592
  • Title

    Fabrication of a novel cantilever-based device by release the stress in a reliable way

  • Author

    Wang, Shuaipeng ; Yang, Jinling ; Chen, Yanning ; Zhang, Haifeng ; Zhao, Dongyan

  • Author_Institution
    NaRi Smartchip Microelectronics technology company limited, No.15 Xiaoying Rd(E), Qinghe, Beijing, China
  • fYear
    2015
  • fDate
    11-14 Aug. 2015
  • Firstpage
    1162
  • Lastpage
    1164
  • Abstract
    Processes that define the cantilever sensor from the front side of the wafer are designed to release the stress of the buried oxide layer and top silicon layer. This approach can be applied to enhance the performance of all the cantilever-based sensors. Then, a novel cantilever array sensor was micro-fabricated for precise bio-marker detection.
  • Keywords
    Biomedical optical imaging; Biosensors; Optical device fabrication; Optical sensors; Packaging; MEMS; SOI precess; bio-sensor; cantilever; reliable;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Packaging Technology (ICEPT), 2015 16th International Conference on
  • Conference_Location
    Changsha, China
  • Type

    conf

  • DOI
    10.1109/ICEPT.2015.7236786
  • Filename
    7236786
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2023592