Title :
Fabrication of 45° optical mirrors on
Author :
Strundman, C. ; Rosengren, Lars ; Bäcklund, Ylva
fDate :
29 Jan-2 Feb 1995
Keywords :
Anisotropic magnetoresistance; Crystallography; Geometrical optics; Geometry; Mirrors; Optical device fabrication; Silicon; Wet etching;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472572
