Title :
DEEMO: a new technology for the fabrication of microstructures
Author :
Elders, J. ; Jansen, H.V. ; Elwenspoek, M. ; Ehrfeld, W.
fDate :
29 Jan-2 Feb 1995
Keywords :
Anisotropic magnetoresistance; Dry etching; Electrostatic actuators; Embossing; Fabrication; Microstructure; Optical materials; Silicon; Technological innovation; X-ray lithography;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472573
