Title :
Fabrication of multi-layer eddy current micro sensors for non-destructive inspection of small diameter pipes
Author :
Hamasaki, Yukio ; Ide, Takahiro
fDate :
29 Jan-2 Feb 1995
Keywords :
Coils; Copper; Eddy currents; Fabrication; Inductance; Inspection; Lithography; Magnetic sensors; Spirals; Surface resistance;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472574
