Fabrication of multi-layer eddy current micro sensors for non-destructive inspection of small diameter pipes

Author

Hamasaki, Yukio ; Ide, Takahiro

fYear

1995

fDate

29 Jan-2 Feb 1995

Firstpage

232

Keywords

Coils; Copper; Eddy currents; Fabrication; Inductance; Inspection; Lithography; Magnetic sensors; Spirals; Surface resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

Print_ISBN

0-7803-2503-6

Type

DOI

10.1109/MEMSYS.1995.472574

Filename

472574

Link To Document